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Towards an Industrial Laser Doping Process for the Selective Emitter Using Phosphoric Acid as Dopant
Towards an Industrial Laser Doping Process for the Selective Emitter Using Phosphoric Acid as Dopant
2011
Jörg Krüger
J. Bonse
Guido Mann
Robert Koter
Simone Pentzien
R. Böhme
L. Voelkel
U. Partsch
H. Grießmann
M Geier
Markus Eberstein
Keywords:
Doping
Dopant
Phosphoric acid
Laser
Common emitter
Materials science
Inorganic chemistry
Optoelectronics
laser processing
Correction
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