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Al-neal Degrades Al2O3 Passivation of Silicon Surface
Al-neal Degrades Al2O3 Passivation of Silicon Surface
2021
Olli E. Setälä
Toni P. Pasanen
Jennifer Ott
Ville Vähänissi
Hele Savin
Keywords:
Optoelectronics
Materials science
Silicon
Passivation
Aluminum oxide
Correction
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