Applying Peltier Thermoelectric Coolers to Compensate Temperature Errors of the MEMS Used in UAVs

This article presents the results of theoretical studies related to the application of Peltier film microelements to compensate the temperature drift of fundamental frequency typical for the MEMS resonators with a frequency-modulated output. It is shown that the proposed method can ensure a correction within the range limited by the amount of Joule heat released during the sensor operation.