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PtHf Silicide Formation Utilizing PtHf-Alloy Target for Low Contact Resistivity
PtHf Silicide Formation Utilizing PtHf-Alloy Target for Low Contact Resistivity
2016
Shun-ichiro Ohmi
Mengyi Chen
Xiaopeng Wu
Yasushi Masahiro
Keywords:
Alloy
Electrical resistivity and conductivity
Engineering
Silicide
Metallurgy
Correction
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