Enhancement of Mechanical Stability of Silicon Macrospecimens Containing Hierarchically-Structured Porous Silicon

The paper presents the research findings in the field of mechanical stability of single-crystal silicon macrospecimens containing hierarchically-structured porous silicon. Macrospecimens are designed to produce a porous layer 170 μm thick, without cracking and fracture. Indentation tests show that the crack resistance of porous silicon is higher than that of single-crystal silicon. The parameters of porous silicon are determined herein. The adsorption and desorption properties of the porous silicon layer are examined. As a result, it is shown that the proposed silicon macrospecimens can be used, for example, for cancer drug delivery.