Scientific, Back-Illuminated CCD Development for the Transiting Exoplanet Survey Satellite

We describe the development of the fully depleted, back-illuminated, charge coupled devices for the Transiting Exoplanet Survey Satellite, which includes a set of four wide angle telescopes, each having a 2x2 array of CCDs. The devices are fabricated on the newly upgraded 200-mm wafer line at Lincoln Laboratory. We discuss methods used to produce the devices and present early performance results from the 100-micron thick, 15x15-μm, 2kx4k pixel frame transfer CCDs.