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30am2-PN-38 Development of textured electret for preventing stiction
30am2-PN-38 Development of textured electret for preventing stiction
2015
M. Shimokisaki
M. Suzuki
T. Takahashi
Y Yoshikawa
S Aoyagi
Keywords:
Stiction
Electret
Electronic engineering
Materials science
Composite material
Correction
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