Innovative technical solutions for evaporation of multilayer coatings by EB-PVD method

Abstract The article presents problems concerning the use of the EB-PVD method ( electron beam physical vapour deposition ) for the evaporation of materials with different thermal properties including different coefficients of thermal conductivity, different melting points and evaporation temperatures. The evaporation process of material by electron beam was described and also the technical solutions for crucibles and devices that enable the production of composite coatings by EB-PVD were presented. The authors presented an innovative design of a multi-position modular crucible that provides different cooling intensity for materials with different thermal properties. This enables the efficient evaporation of various materials in the same technological process, which is essential for composing compound coatings, i.e. multi-component, composite and multi-layer.