A device for generating radiation by means of a gas discharge
2005
A device for generating radiation by means of a gas discharge comprising a discharge chamber having a discharge area for the gas discharge to form a plasma, the radiation emitting from a starting material, and an emission opening for the generated radiation, a first and a second rotatably mounted electrode and a high voltage supply for generating high voltage pulses between the two electrodes, characterized, in that the electrodes (1, 2, 1 ', 2') is rigidly connected with spaced to each other and about a common axis (XX) are mounted rotatably, wherein a free space is formed by the mutual spacing, in the capacitor elements (5) of the high voltage power supply arranged are, and that the electrodes (1, 2, 1 ', 2') with both the capacitor elements (5) and with a voltage source (6) for charging the capacitor elements (5) are electrically connected.
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