Developing A Mems Device for High-Throughput Multi-Parameter Single Cell Biophysical Analysis

We introduced a MEMS device to perform direct measurements on electrical and mechanical properties of single cancer cells. Working in a continuous flow format permits high-throughput measurements. The device design allows us to define fixed or movable electrodes as part of the side-walls of an embedded microchannel. The stable air-liquid interface at micro-sized gaps between the electrodes and the channel wall provide flow continuity without causing any leakage problems. This unified processing approach allows us to define optimized electrode pattern configuration for both electrical and mechanical characterization areas. Moreover, the movable electrode is in direct contact with passing cells which enables direct sensing during compression. The device can perform both electrical and mechanical measurements on single cells in a continuous flow as demonstrated and also validated by optical control measurements. The proposed method aims at providing high-throughput biophysical cytometry, in an optics- and marker-free way, for cancer cell evaluation.