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Integration of Piezoelectric Device with Fragile MEMS Structure and its Application
Integration of Piezoelectric Device with Fragile MEMS Structure and its Application
2003
J. Masaki
K Naka
H. Haneda
Hiroshi Kanekiyo
Satoshi Konishi
Keywords:
Microelectromechanical systems
Electronic engineering
Materials science
Piezoelectricity
Optoelectronics
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