Investigation of light scattering from rough periodic surfaces — numerical solutions

Abstract The Beckmann scalar scattering model based on the Kirchhoff approximation was used to investigate the scattering of light from periodic surfaces whose roughness amplitude is comparable to, and greater than, the illumination wavelength. Solutions by numerical integration were obtained for surfaces of different profiles and of different roughnesses. It was found that the scattering patterns from these surfaces were very different at large roughness amplitudes. As the incident angle was varied on a given surface, it was also observed that the intensity of any individual diffraction order oscillated and the degree of oscillation was directly related to roughness. By utilizing this property, a new procedure could be developed for surface roughness assessment.