Apparatus and method for generating extreme ultraviolet radiation by means of an electrically operated gas discharge

A device for generating extreme ultraviolet radiation by means of an electrically operated gas discharge, comprising a discharge chamber having a discharge area for a gas discharge to form a radiation emitting plasma, a first and a second disc-shaped electrode, wherein at least one of the electrodes is rotatably mounted and has a with a metallic melt to be covered the edge region, an energy beam source for providing a Vorionisationsstrahls and a processor coupled to the electrode discharge circuit for generating high-voltage pulses, characterized, in that having to be covered edge region of at least one closed circumferential along the electrode edge on the electrode surface and wetting formed for the metallic melt receiving area (3), directed onto which a coating (4, 14, 21) for regenerative application of the metallic melt, with a having a valve control means (10) connected to the shut-off valve (11).