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Silicon to silicon direct bonding-characterization of the interface and manufacture of p-i-n diodes
Silicon to silicon direct bonding-characterization of the interface and manufacture of p-i-n diodes
2002
R. Wiget
E. P. Burte
J. Gyulai
H. Ryssel
Keywords:
Electronic engineering
Anodic bonding
Engineering
Diode
Direct bonding
Silicon
Correction
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