Kinetic Monte Carlo for Process Simulation: First Principles Calibrated Parameters for BO 2
2021
The formation energies and diffusion paths of Oi, O2i and BO2 complex in silicon are determined using ab initio calculations and used to calibrate a Kinetic Monte Carlo. The aim is to simulate the formation of the BO2 complex in Technology Computer Aided Design tools.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
20
References
0
Citations
NaN
KQI