A Mode-localized Resonant Accelerometer with Self-temperature Drift Suppression

This paper theoretically and experimentally demonstrates the temperature drift suppression capability of a mode-localized accelerometer based on three degree of freedom weakly coupled resonators. The theoretical model of the temperature characteristics of the amplitude ratio and frequency of the mode-localized accelerometer under the influence of Young's modulus were established. The effect of the temperature on the input conversion mechanism and weakly coupled resonators are both included in the model. The simulation results show that thermal stress is the main factor affecting the output metric of the mode-localized accelerometer with mechanical coupling beam and, consequently, a stress relief structure is proposed to suppress the effect of stress on the output metric. Compared with the mode-localized accelerometer without stress relief structure, the temperature coefficients of sensitivity and two output metrics of the accelerometer with the stress relief structure are both suppressed by one order of magnitude via the simulation and experiment verification from 30°C to 60°C. And the temperature suppression coefficient of amplitude ratio is improved by 43.9 times than that of the frequency which shows that the mode-localized accelerometer based on amplitude ratio has an excellent temperature drift suppression capability.