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Acemap > Paper > Fabrication of {Nb/Al}_{2}{O}_{3}/{Nb} Josephson Junctions Using In Situ Magnetron Sputtering and Atomic Layer Deposition

Fabrication of {Nb/Al}_{2}{O}_{3}/{Nb} Josephson Junctions Using In Situ Magnetron Sputtering and Atomic Layer Deposition

2013 
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