Micro- and nanostructures formation on glass surface with different parameters of excimer laser irradiation

We present the formation of micro- and nanostructures on glass surfaces by 15-ns 193-nm ArF laser irradiation during the laser irradiation. The effect of laser fluence and pulse number on the micro- and nanostructure formation is studied. The scanning electron microscopy images of the irradiated surfaces show that the shape and density of the microstructures change with different laser parameters. Our results show that the microstructure formation is a characteristic feature of the ablation threshold of the glass surface at 15-ns ArF laser irradiation. The ordered microstructures are obtained with 500 pulses at 350  mJ  /  cm2 laser fluence. Also, the nanostructures can be formed at subthreshold laser fluence. The micro-Raman analysis of the glass surfaces before and after the laser irradiation shows that no phase change has occurred during surface structuring. The obtained compact and ordered micro- and nanostructures or multiscale structured surface can be applied in photonics and surface science.