Vibration Measurement in High Precision for Flexible Structure Based on Microscopic Vision

Vibration measurement for flexible structures is widely used in various kinds of precision engineering fields. However, it is a challenge to measure vibration in special applications, such as cryogenic, dangerous and magnetic interference. In this paper, a high-precision vibration measurement system based on machine vision is designed. The circle center on the target is employed as the image feature. The circle feature is extracted using the improved algorithm based on gradient Hough transform. Then the image Jacobian matrix is used to compute the vibrations in Cartesian space from the image feature changes. Experiments verify the effectiveness of the proposed methods.