High resolution projection X-ray microscope equipped with fluorescent X-ray analyzer and its applications

We have newly developed an open type fine-focus X-ray tube TX-510 to realize a spatial resolution of 50nm and to radiate low energy characteristic X-rays for giving high absorption contrast to images of microscopic organisms. The TX-510 employs a ZrO/W(100) Schottky emitter and an In-Lens Field Emission Gun. The key points of the improvements are (1) reduced spherical aberration coefficient of magnetic objective lens, (2) easy and accurate focusing, (3) newly designed astigmatism compensator, (4) segmented thin film target for interchanging the target materials by electron beam shift and (5) fluorescent X-ray analysis system.