A Method of Forming Full-Wheatstone Bridge for Linear TMR Magnetic Sensors

The tunneling magnetoresistance (TMR) magnetic sensor is usually fabricated with a full-Wheatstone bridge structure, to obtain stable and linear output. However, its manufacturing process is complex at present. Aim to facilitate the large-scale industrial production, a novel and concise method of forming a full-Wheatstone bridge TMR magnetic sensor is introduced. Both simulations and experimental results prove the feasibility of this method.