An Integrated Multiple Silicon Drift Detector System for Transmission Electron Microscopes

A new EDX system, consisting of multiple SDDs has been developed for an FEI 200kV TEM/STEM in which the SDDs, designed by PN Sensor with a total collection angle approaching 1 srad has been obtained by placing 4 SDD's symmetrically around the electron beam axis in the objective lens chamber. The massive increase in solid angle of collection compared to previous designs in S/TEMs leads to a huge reduction in the time for EDX mapping. First results from the detector are reported.