THE MEASUREMENT OF MICROFORCE-SENSOR THERMAL DRIFT MEASURED BY BALANCE IN CMS

The micro-force sensors were widely used in the areas of micro-assembly, micro-factories, micro-robotics, MEMS characterization, Nano-manipulation, Biological and biomedical research, Material properties, etc. It was also used as a transfer standard in micro-force machine or instrument. The capacitance-type force sensor was used to sense forces with micro-Newton (sub-milligram) resolution. And it was used as a transducer for the micro-force instrument in CMS. In this paper, we will report the preliminary results of thermal drift properties in capacitance-type force sensor.