Old Web
English
Sign In
Acemap
>
Paper
>
Breakdown process of dual-frequency Capacitively Coupled Plasma: A collective simulation
Breakdown process of dual-frequency Capacitively Coupled Plasma: A collective simulation
2020
Hao Wu
Youyou Zhou
Jiamao Gao
Yanli Peng
Zhijiang Wang
Wei Jiang
Keywords:
Capacitively coupled plasma
Process (computing)
dual frequency
Optoelectronics
Materials science
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]