Optimization of the active controlled microfluidic valve with annular boundary

In our previous report, the active controlled microfluidic valve with annular boundary driven by the circular piezoelectric unimorph actuator was presented. In order to improve the performance of the active controlled microfluidic valve with annular boundary, the optimization of the active controlled microfluidic valve with annular boundary is presented. For simplify the optimal design, we mainly optimize the radius and thickness of piezoelectric ceramics based on the multiobjective parameter optimization theory according to the constraint conditions for the design variables. The research results show that: (1)The deflection of the circular piezoelectric unimorph actuator is nonlinear with the radius of piezoelectric ceramics. The deflection first increases and then decreases with the increase of radius; (2)The flowrate of the valve increases with the increase of piezoelectric ceramic radius. When the radius of piezoelectric ceramic is about 8 mm, the flowrate reaches the maximum value of 0.54 ml/s. When increases the radius of the piezoelectric ceramic, the flowrate of the active controlled microfluidic valve with annular boundary decreases; (3)The ACMV with annular boundary has a nonlinear relationship with the thickness of piezoelectric ceramic, which decreases with the thickness of piezoelectric ceramic. When increases the thickness of piezoelectric ceramic from 0.1 mm to 0.2 mm, the maximum flow difference is 0.49 ml/s. The optimization results provide a theoretical basis for the design of the microfluidic active control pump.