The dynamic characteristics of a valve-less micropump

The aim of this paper is to investigate the dynamic characteristics of a valve-less micropump. A dynamic mathematical model of the micropump based on a hydraulic analogue system and a simulation method using AMESim software are developed. By using the finite-element analysis method, the static analysis of the diaphragm is carried out to obtain the maximum deflection and volumetric displacement. Dynamic characteristics of the valve-less micropump under different excitation voltages and frequencies are simulated and tested. Because of the discrepancy between simulation results and experimental data at frequencies other than the natural frequency, the revised model for the diaphragm maximum volumetric displacement is presented. Comparison between the simulation results based on the revised model and experimental data shows that the dynamic mathematical model based on the hydraulic analogue system is capable of predicting dynamic characteristics of the valve-less micropump at any excitation voltage and frequency.