Cancer radiotherapy equipment as a cause of soft-errors in electronic equipment [effects on IC dielectric materials]

The undesirable production of secondary neutrons by cancer radiotherapy linear accelerators has been demonstrated to cause soft-errors in nearby electronics through the /sup 10/B(n, a)/sup 7/Li reaction. The /sup 10/B is a component in the BPSG used as a dielectric material in some IC fabrication processes.