Wireless drive of a MEMS ciliary motion actuator via coupled magnetic resonances using micro inductors

This paper reports successful wireless drive of a 100 µm × 500 µm × 5 µm MEMS thermal actuator via micro-scale coupled magnetic resonances. Receiver inductor is 500 µm × 500 µm, which is the same scale as the actuator. There is no need for rectifier circuit to drive the actuator, enabling power transmission with zero conversion loss. The transmission efficiency of the system was also evaluated and the efficacy of magnetic resonant coupling for micro-scale power transmission was verified. The system using downsized transmitter inductor was also evaluated and we verified that it has capability of driving the actuator wirelessly.