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Analysis of Shear Induced Particle Agglomeration in CMP Slurries
Analysis of Shear Induced Particle Agglomeration in CMP Slurries
2010
Aniruddh Khanna
Purushottam Kumar
Jaeseok Lee
Abhudaya Mishra
Arul Chakkaravarthi Arjunan
Deepika Singh
Rajiv K. Singh
Keywords:
Particle
Composite material
Slurry
Materials science
Economies of agglomeration
Shear (sheet metal)
Correction
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