Advanced Control System For Excimer Lasers

Modern excimer lasers comprise feedback systems to stabilize the output at preselected values. The shortcomings of the conventional systems comprising a single microprocessor and a lot of signal and command lines are (i) low data transfer rate and (ii) sensitivity against electromagnetic interference which is always present within discharge-excited excimer lasers. These shortcomings can be removed by utilizing a local-area network (LAN) with microprocessors at each actuator and detector, which communicate by a single fiberoptic ring line.