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Effects of ultrasonic vibration on slurryless electrochemical mechanical polishing of 4H-SiC (0001) surface
Effects of ultrasonic vibration on slurryless electrochemical mechanical polishing of 4H-SiC (0001) surface
2020
Xiaozhe Yang
Xu Yang
Kentaro Kawai
Kenta Arima
Kazuya Yamamura
Keywords:
ultrasonic vibration
Polishing
Composite material
surface
Materials science
Electrochemistry
Correction
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