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Piezoelectric Micromachined Ultrasonic Transducers based on PZT films
Piezoelectric Micromachined Ultrasonic Transducers based on PZT films
2006
Belgacem
Calame
Muralt
Keywords:
Surface micromachining
Piezoelectricity
Ultrasonic sensor
Materials science
Thin film
Transducer
Optoelectronics
Correction
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