Secondary phase area fraction determination using SEM-EDS quantitative mapping

Abstract A methodology for determining secondary phase area fraction using X-ray energy dispersive spectroscopy (EDS) quantitative mapping is proposed, based on the operating parameters, principally the electron beam energy, beam current, pixel dwell time and step size. This methodology has successfully been employed to determine the area fractions of different phases in two different high performance micro alloy steels. Some limitations of the method have been demonstrated via a determination of the secondary phase area fraction in a magnesium alloy.