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Measurement of Low Carbon Concentration in Silicon Substrate Using Deep Level Transient Spectroscopy Method.
Measurement of Low Carbon Concentration in Silicon Substrate Using Deep Level Transient Spectroscopy Method.
2016
Kazutaka Eriguchi
Noritomo Mitsugi
Shuichi Samata
Keywords:
Carbon
Substrate (chemistry)
Deep-level transient spectroscopy
Silicon
Materials science
Analytical chemistry
carbon contamination
Correction
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