A MEMS-based flow sensor with membrane cantilever beam array structure

This paper analyzed four different structures of flow sensor, the rectangular membrane cantilever beam array structure, the trapezoidal membrane cantilever beam array structure, the inverted trapezoidal membrane cantilever beam array structure and the triangular membrane cantilever beam array structure. The numerical and simulation results show that the inverted trapezoidal membrane cantilever beam array structure is the best among these four structures. The measuring range of the designed flow sensor and the effective optimization design are also discussed in this paper. The results reveal that the ideal measuring range of designed flow sensor is 0.3 m/s to 3.5 m/s.