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Synthesis of Alumina Thin Films Using Reactive Magnetron Sputtering Method
Synthesis of Alumina Thin Films Using Reactive Magnetron Sputtering Method
2017
Guillermo Angarita
C. Palacio
M. Trujillo
Mauricio Arroyave
Keywords:
High-power impulse magnetron sputtering
Sputter deposition
Thin film
Analytical chemistry
Materials science
Sputtering
Optoelectronics
reactive magnetron
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