Technology for YBa/sub 2/Cu/sub 3/O/sub 7/ SNS- and SIS-Josephson junctions

Ramp-edge Josephson junctions from the high-temperature superconductor YBa/sub 2/Cu/sub 3/O/sub 7/ require a multilayer preparation process. In order to increase the reproducability of the junction characteristics we investigate the subprocesses using statistical methods for the design of experiments. The optimization of the process parameters enables us to prepare ramp-edge Josephson junctions with PrBa/sub 2/Cu/sub 3/O/sub 7/ as barrier material which exhibit tighter barriers. Adapting the growth conditions for YBa/sub 2/Cu/sub 3/O/sub 7/ on MgO films we prepared Josephson junctions with a 10 nm MgO barrier.