Design of micro – and nanoelectromechanical resonators taking into account internal temperature fields

Results of researches of micro and nanoelectromechanical resonators of GHz range are given. The problems connected with development of theoretical models of these devices considering influence of dimensional factors are analysed. Problems of definition of fluctuations of resonators for the subnanometer range of amplitudes are considered. The assessment of applicability of the existing technical means as secondary measuring converters in MEM and NEM resonators is carried out.