Composition, structure, and luminescent properties of SiOxNy(Si) composite layers containing Si nanocrystals

A relationship between the chemical composition, structure and luminescent properties of light-emitting SiOxNy(Si) composite layers with Si nanocrystals is demonstrated. Photoluminescence (PL) with a maximum of intensity at 500-600 nm is observed in a narrow region of chemical compositions with relatively small Si excess (about 10 at. %). Composite layers structure is studied by means of HRTEM. Appearance of nanocrystals due to annealing is accompanied by substantial growth (30-40 times) of PL intensity but do not change PL spectra shape. Chemical composition of structural luminescent-active complexes with excess Si atomes is determined by XPS technique.