Structural changes of CuGaSe2 films during the three-stage process observed by spectroscopic light scattering
2005
Abstract We have studied the three-stage deposition process of CuGaSe 2 (CGS) films, with the help of spectroscopic light scattering (SLS) in situ monitoring method. During the second stage (i.e. deposition of Cu, Se), an abrupt change from a two-layered structure to a single layer, together with a significant increase in the grain size, was observed in the vicinity of the Cu/Ga=1.0 point. Shortly before this abrupt change, a characteristic peak was observed by SLS, accompanied by a definitive change in depth-oriented distribution of Cu and Na.
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