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Experimental and theoretical research for carrier mobility of thin polycrystalline silicon films in application of VLSI
Experimental and theoretical research for carrier mobility of thin polycrystalline silicon films in application of VLSI
1989
Yangyuan Wang
Jiang Tao
Ruqi Han
Lijiu Ji
Aizhen Zhang
Keywords:
Polycrystalline silicon
Electron mobility
Electronic engineering
Engineering physics
Engineering
Very-large-scale integration
theoretical research
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