Evaluation of Thermal Drift of Nano-CMM

started developing novel systems and key technology as "Nano-CMM project". In this project, our intention is developing the CMM with nanometer resolution to measure three-dimensional positions, orientations and parameters of three-dimensional features. For developing Nano-CMM, we established the specifications and the key elements of each factor. In this report, the thermal drift of X and Y stages of Nano-CMM were evaluated. Then we made the new prototype of Nano-CMM made of low thermal expansion iron steel to reduce the influence of thermal drift. Basic concept of Nano-CMM Coordinate Measuring Machines (CMMs) have been developed and widely used to measure quickly and complex shapes with high accuracy as improving precision of industrial workpieces. The system and the key technology of traditional CMMs come to maturity in the year of the past 10. However, the limits and the drawbacks of the traditional CMMs are clearly such as the limit of the accuracy, measuring range, measuring speed and so on. Therefore, we have started developing novel systems and key technology as "Nano- CMM project". In this project, our intention is developing the CMM with nanometer resolution to measure three-dimensional positions, orientations and parameters of three-dimensional features (Fig. 1). For developing Nano-CMM, we established the specifications and the key elements of each factor, such as scales, actuators, tables and a probing system. Firstly, we decide that Nano-CMM has simple and the