Displacement Measurement in the Vertical Axis of the Measuring Microscope using Laser Triangulation Sensor

The article deals with assessment of the suitability of using a laser triangulation sensor to measure the displacement in vertical axis of a measuring microscope. Data obtained from sensor calibration are used for determination of measuring range in which the smallest measurement error occurs. Linear approximation of the inverse calibration function is applied to correct systematic errors in reduced measuring range of the sensor. Residual measurement errors of corrected sensor output can be applied in uncertainty calculation for sensor future measurements.