Arrangement of a planar 6D positioner

The invention relates to a magnetically guided movement system, the rotor movement is effected without any mechanical contact between the stator and the rotor with the aid of magnetic field forces. However, the recording of all degrees of freedom for these purely magnetically guided movement systems in translation in x, y and z directions and rotationally necessary about the axes x, y, and z, a position signal of the rotor for the control of the magnetically controlled entity in all provide 6 degrees of freedom. It is understood in solution of the inventive object of a planar coil array, which is preferably arranged on a stator plate and is fixed. A coil array is made up of 6 flat coils which are arranged offset in a star shape symmetrically with 3 pairs preferably. In the center of the arrangement there is a free space which is used for the arrangement of a 6D-measuring head, said measuring head is again positioned defined on a stator plate. Three rows of magnets are arranged in a triangular arrangement, a free space in its center. This free space is preferably used for the arrangement of a 6D-6D of the surface scale measurement system.