A DEVICE OF TRANSDUCING MECHANICAL FORCE USING METAL DIFFRACTION GRATING SENSOR

A device of transducing mechanical force using a metal based diffractive grating sensor is presented The diffraction gratings are successfully fabricated on a metal at sub-micron order using the holographic interferometry and molding processes . First, holographic interference using a He-Cd (325nm) laser was used to create the master of the periodic line structure on an i-line sub-micron positive photoresist film. A 200nm nickel thin film was then sputtered onto the positive photoresist. Pattern was then transferred to a metal using Nickel-Cobalt electroforming. The micro MTS tensile test incorporated with the surface diffraction grating experiment showed that a relationship between the load and the observed diffraction pattern shift could be obtained with an excellent correlation .