Monitoring of W accumulation in ion implanter beam line utilizing portable XRF instrument

It was attempted to monitor the tungsten (W) accumulation in the beam line of ion implanter utilizing a novel portable X-ray fluorescence (XRF). In the implanter after production running, some modules and consumable parts were effectively measured with the XRF instrument and it was verified that W atoms from the ion source area hit the chamber walls in AMU magnet and are accumulated there as predicted.