Optical path de-embedding method for S parameter measurement of optical device

The invention discloses an optical path de-embedding method for S parameter measurement of an optical device. The method comprises the following steps that: step one, when an S parameter of an optical clamp is unknown, an equivalent model of the optical clamp is constructed according to a characteristic parameter of the optical clamp, and then a step two is carried out; and if the S parameter of the optical clamp is known, a step three is carried out directly; step two, the S parameter of the optical clamp is solved based on the three characteristic parameters, including the length, refractive index, and loss value of the equivalent model of the optical clamp; and step three, an optical clamp de-embedding formula is obtained by using the S parameter of the optical clamp, and calculation is carried out on the S parameter of the optical clamp and a total S parameter of the optical clamp and a measured piece directly, thereby obtaining an S parameter of the measured piece. With the method, the S parameter of the optical clamp can be obtained easily. Direct operation is carried out on the S parameter of the optical clamp and the total S parameter of the optical clamp and the measured piece without any tedious parameter change, so that the operation becomes simple and convenient; and the influence of the optical clamp is eliminated, thereby improving the measurement precision.