29Si and 30Si enrichment by IR MPD of Si2F6

Abstract The infrared multiple-photon decomposition of Si 2 F 6 has been studied as a function of irradiation wavenumber using a collimated pulsed beam from a CO 2 TEA laser. The main decomposition product SiF 4 was found to be enriched with 29 Si and 30 Si. For example, SiF 4 contained 6% 29 Si and 46% 30 Si in the irradiation of 2 Torr natural Si 2 F 6 with the laser radiation at 949.43 cm −1 and 0.36 J cm −2 .