Real-Time Thickness Measurement Using Resonant Eddy-Current Sensor

In this work, we propose a real-time noncontact thickness measurement system for conductive materials based on an inductor–capacitor ( LC ) resonant eddy-current sensor. For the aluminum, copper, stainless steel 304, and carbon steel samples of various thicknesses, the in-phase and quadrature components of the sensor output taken during liftoff scans are found to be a series of quadratic-like curves on the phase versus logarithmic amplitude diagram. These curves can be used to generate the standard phase–amplitude relations for thickness conversion. The phase–amplitude relations of the thickness between the values of standard samples are calculated by cubic spline interpolation. With the standard database of phase–amplitude relations, the noncontact thickness measurement was implemented in real time for the copper foil sample with an error of ±3% when the liftoff distance is less than 5 mm. The liftoff tolerance is as large as 100% of the probe diameter, indicating that the proposed method is useful for online quality inspection of conductor films on flexible substrates.