Two Dimensional Micro Magnetic Sensor Array

This paper proposes two new kinds of two dimensional micro magnetic sensor arrays, which are designed for a position sensor in a micro superconducting magnetic conveyance system with feedback control. One is a magnetic switch array with a nickel cantilever structure fabricated by electro-plating. Another one is a Hall sensor array consisted of so-called a MOS-Hall element, which is a MOS device in fact, but works as a Hall element. We have fabricated these two different types of sensor arrays by micromachining process, and tested their performances. The sensing principle, fabrication process and experimental results are reported.